vacuum coating system

基本解释

A new vacuum coating system was designed by analyzing the features of current liquid coating system .
通过分析国内外液体喷涂设备的特点，研制了真空后喷涂试验系统。
A new plasma diagnostic system with Langmuir probe is designed to measure the plasma parameters in a plasma enhanced chemical vapor deposition (PECVD) vacuum coating machine.
开发了一个朗缪尔探针等离子体诊断系统对PECVD真空镀膜机进行了等离子体参数诊断。
In this paper, the performance of the airtightness for vacuum coating equipment, the characteristics of leak detection with Helium Mass-spectrometer and the leak detection system are described.
本文论述了真空镀膜设备气密性的特点、氦质谱仪检漏特点及其检漏系统，说明氦质谱仪检漏是检查真空镀膜设备漏气的最有效的方法。